2 heads of a shaft motor are used at the X-axis
1 head of a shaft motor is used at the Y-axis
Features of a shaft motor
Quiet, no friction during movement
Big thrust (6000N)
Repetition of position accuracy is available in 0.1μm.
Compared with the other drive system, it is very stable in speeding and possible to control with stable speed.
Possible to operate by a high-speed drive (6.5 m/Sec) to low-speed drive (8μm /Sec).
Can be used in strong environments such as underwater and in a vacuum.
A system is compact and simple.