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Invited Paper

Applications of Imaging Interferometry

J a s o n R e e d a , P a u l W i l k i n s o n a , K e i t h O D o h e r t y a , J o a n n a S c h m i t b , S e n H a n b , J o s h T r o k e c , M i c h a e l T e i t e l l c , W i l l i a m K l u g d , a n d J a m e s G i m z e w s k i aDepartment of Chemistry and Biochemistry; California Nanosystems Institute, UCLA, Los Angeles CA 90095; bVeeco Metrology, 2650 E. Elvira Road, Tucson, AZ 85706; cUCLA Department of Pathology and Laboratory Medicine; California Nanosystems Institute, UCLA, Los Angeles CA 90095; dDepartment of Mechanical and Aerospace Engineering, UCLA, Los Angeles CA 90095 a .

ABSTRACT

Here we report application of imaging interferometry to the study of nanomechanical motion in biosensors and living biological systems. Using strobed interferometric microscopy we are able to probe the dynamic behavior of individual (100 x 500 x 1 micron) cantilevers in an eight cantilever array over frequencies from

  • 0

    – 1 MHz.

mechanical metabolism

In a related approach, we have developed an interferometric method to measure cell-specific

signals in real and movement,

time. along

This yields with response

real-time diagnostic information about to chemical and physical stimuli. Our

cell

structure,

new

approach

makes probes

use and

of “nanomirrors” fixed to the cell membrane. can be interrogated, rapidly, by optical profiling

These mirrors metrology.

act

as

nanoscopic

displacement

Keywords: Optical profiler, microcantilever, live cell imaging

1. MICRO CANTILEVER DYNAMICS

Silicon micro cantilevers are used as transducers for a wide range of physical, chemical and biochemical stimuli, where the exhibit exquisite sensitivity (10-18 g, 10-15 J, 10-9 M, etc) over a wide range of temperatures (100 mK – 1300 K). [1-4] [5] [6, 7] [5, 8] This is accomplished by inducing static bending in the cantilever structure or by changing the cantilever’s resonant behavior, both easily measurable responses. There is increasing interest in using higher-order resonant modes to achieve extra sensitivity;

however this raises the question of exactly which modes are excited in the cantilever. interferometric microscopy we are able to probe the dynamic behavior of individual (100 x cantilevers in an eight cantilever array over frequencies from 0 – 1 MHz.

Using

strobed

500 x 1

micron)

1.1 Microcantilever Arrays

Eight silicon cantilevers are arranged in an array on a silicon base, each of which is 500 microns long by 100 microns wide and 0.9 microns thick (Fig. 1). The cantilever pitch is 250 microns, which was originally chosen to make optical communication arrays. These arrays were obtained from IBM Zurich Research Laboratories, and fabricated from a <100> oriented wafer, so any horizontal face on the chip is orientation <100>. The cantilevers are extend in the <110> direction. The cantilever array was fixed to a cylindrical piezo actuator driven in the z-axis by a sinusoidal signal (0 – 50 v; 0-150 nm) at the observation frequencies (0 – 1 MHz).

Interferometry XIII: Applications, edited by Erik L. Novak, Wolfgang Osten, Christophe Gorecki, Proc. of SPIE Vol. 6293, 629301, (2006) · 0277-786X/06/$15 · doi: 10.1117/12.683948

Proc. of SPIE Vol. 6293 629301-1

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