Fig. 1. An eight micro cantilever array shown to scale
The measurement of the static and dynamic modes of cantilevers was performed on the Veeco interference microscope DMEMS 1100 with a red LED used for stroboscopic illumination and 5X 0.13NA Michelson objective (Fig. 2). The DMEMS 1100 in principle is an optical microscope with a Michelson interference objective that allows for the observation of not only lateral features with typical optical resolution but also height dimensions below the scale of one nanometer . The interference images are collected by a CCD camera during the scan of the interference objective through focus. Each pixel’s interference intensity from all collected images is used to determine the shape of the object.
Strobed LED Light Source
Cantilever Array —
. Fig. 2. Diagram of the experimental set up showing the optical profiler and cantilever array
Proc. of SPIE Vol. 6293 629301-2