1. 3 Results
The DMEMS system enabled spatial visualization of 16 cantilever modes with nanometer-scale amplitudes; combined with FEA calculations we directly assignd mode indicies (Fig. 3). We observed the reversal of specific modes between experiment and theory. We also observed small non-uniformity of individual cantilevers in the array (Fig. 4), and the clear relationship between boundary conditions and resonant behavior. Our conclusion is that the assignment of a resonant frequency spectrum is fairly complex and doesn’t necessarily follow simple intuition.
B _ _ _ _ _ I f l U B 1 0 Driving Freq (Hz) 1 f l U B 2 0 0 f l 0 0 3 0 0 f l U B 4 0 0 f l 0 0 B O B f l U B BBBIJBB
I flUB flUB
Fig. 3. Displacement versus frequency spectrum of one in-phase cantilever response recorded using phase-sensitive detection. The peaks are assigned to the longitudinal (L) or torsional (T) resonance modes of a single cantilever.
Proc. of SPIE Vol. 6293 629301-3