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161 kHz

6

5

4

3

2

400 kHz

8

6

5

4

3

ISO

2

U nm

:V

(0

01

a

CO

Fig. 4. In-phase freeze frame interferometric images from the cantilever array driven at (A) 161 kHz, (B) 400 kHz and (C) 953 kHz, obtained by the Veeco Metrology DMEMS stroboscopic interference microscope.

2. NANOMIRRORS

Atomic force microscopy studies by us and others indicates that cell-specific mechanical signals yield real- time diagnostic information about cell structure, metabolism and movement, along with response to

chemical and physical stimuli.[10, 11] Using imaging interferometry, we have developed a higher- t h r o u g h p u t e x p e r i m e n t a l a p p r o a c h . O u r n e w a p p r o a c h m a k e s u s e o f m a g n e t i c n a n o m i r r o r s f i x e d t o t h e cell membrane, in place of the AFM tip. These mirrors act as nanoscopic displacement probes and can be

interrogated, rapidly, by optical profiling metrology. nanomechanical measurements of hundreds-to- thousands

This approach enables of individual cells.

parallel,

simultaneous

Proc. of SPIE Vol. 6293 629301-4

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