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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 14 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Silicon Surfaces

Bare silicon surfaces - unstable

Hydrogen terminated

React with oxygen to form “native” oxide

Hydrophobic

Native oxide - stable

Not equivalent to thermal oxide

Thickness = about 10Å

Self limiting

Grown by exposure to air or oxidizing solution

Hydrophilic

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