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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 16 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Surface Characteristics

Surfaces with oxygen termination are hydrophilic since they interact with water molecules

Surfaces with hydrogen termination are similar to organic surfaces and do not interact with water.  They are hydrophobic.

SI  SI  SI  SI   SI  SI  SI  SI  SI

SI  SI  SI  SI   SI  SI  SI  SI  SI

O    O   O   O    O   O   O   O   O

H    H   H   H    H   H   H  H   H

HYDROPHILIC

HYDROPHOBIC

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