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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 19 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Cleaning Solutions

Sulfuric Acid-Hydrogen Peroxide (aka SPM or Piranha) solution

Organic removal

Ammonium Hydroxide-Hydrogen Peroxide (aka SC1 or APM)

Particle removal

Hydrochloric Acid-Hydrogen Peroxide (aka SC2 or HPM)

Metallic contamination removal

Dilute HF solutions

Metallic contamination removal with oxide  removal

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