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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 20 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Sulfuric Acid-Hydrogen Peroxide (SPM/Piranha)

Operated at > 100°C

Useful for its oxidizing (organic destruction) capabilities

Will grow an oxide on bare silicon but will not  grow oxide on oxidized surfaces

Peroxide has a limited lifetime, replenished by spiking with added peroxide

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