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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 21 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Sulfuric acid disadvantages

Difficult to remove from surfaces

Water used for rinsing is usually very hot

Amount of sulfur left on surfaces is very high.

Removed easily with a brief HF dip

Solutions also effective in removal of some metal contamination

Sulfuric Acid-Hydrogen Peroxide (cont’d)

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