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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 22 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Sulfuric Acid-Ozone

Some facilities use sulfuric acid with ozone bubbled through it

Effective solution

Long bath life - no water added

Easily overwhelmed by organics

Another variant - ozone in cold water

Good oxidant

Rate of resist removal is fairly slow

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