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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 25 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Lower concentrations

More likely to deposit metals

Control of the concentration is critical

Tradeoffs to be considered with lower concentrations:

higher changeout frequency/shorter bath life

lower particle removal efficiency

metallic contamination

ammonia evaporation and peroxide decomposition

NH4OH-H2O2 Details (cont’d)

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