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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 28 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Corrosion of metal lines due to the transition of the surface from the organic solution to rinse water

Any “active ingredients” left on the surface attack the metal in water

Solution- use an intermediate rinse solvent

Metallic contamination (especially sodium)

Solution - use only low sodium strippers

Less of a problem with “semi-aqueous” strippers

Solvent Based Cleaning Solutions: Problems

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