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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 33 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Bacterial Contamination

All DI systems contain bacteria, which can grow and contaminate systems if nutrients are provided.

Ozonation or hydrogen peroxide (oxidizing agent) is typically employed to keep down bacterial levels.

Once bacterial contamination is established, it is difficult to remove since the bacteria form colonies which are difficult to completely destroy with oxidant solutions.  

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