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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 34 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Drying

Critical step in cleaning

Objective - remove as much of the water as possible before it can dry on the surface and leave residues from any impurities in the water

Two types of dryers

Spin rinse dryer (SRD) - throw off as much water as possible

IPA vapor - displace water with IPA

»

IPA vapor dryer styles

Tank

Vapor jet (VJD)

Marangoni-type

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