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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 43 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Pre-Metal Contact Clean

Clean before metal is deposited

Connects the silicon circuit to the metal lines on top of the die

Nature of the silicon surface is critical to the metal contact resistance

Performed with HF containing etchant  

Important consideration - selectivity of the etchant to the films present (e.g. oxide, BPSG, TEOS)

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