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Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 8 / 47

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Roche

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NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Wet Etch Solutions

HF and Buffered Oxide Etchant - oxide etch

Phosphoric Acid - nitride etch

Nitric Acid and HF - polysilicon etch

Selective metal etches

Al etch - nitric acid, phosphoric acid, acetic acid Ti etch - ammonium hydroxide and hydrogen peroxide W etch - hydrogen peroxide and ammonium hydroxide

Potassium hydroxide solution - silicon etch

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