X hits on this document

Powerpoint document

Thomas S. Roche, Ph.D. Motorola Corporation  1999 Arizona Board of Regents for The University of ... - page 8 / 47

136 views

0 shares

0 downloads

0 comments

8 / 47

Roche

8

NSF/SRC Engineering Research Center for Environmentally Benign Semiconductor Manufacturing

Wet Etch Solutions

HF and Buffered Oxide Etchant - oxide etch

Phosphoric Acid - nitride etch

Nitric Acid and HF - polysilicon etch

Selective metal etches

Al etch - nitric acid, phosphoric acid, acetic acid Ti etch - ammonium hydroxide and hydrogen peroxide W etch - hydrogen peroxide and ammonium hydroxide

Potassium hydroxide solution - silicon etch

Document info
Document views136
Page views136
Page last viewedTue Jan 17 20:01:24 UTC 2017
Pages47
Paragraphs626
Words2617

Comments