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  • V.

    L.Auslender, V.V.Bezuglov, A.A.Bryazgin, V.A.Gorbunov, V.G.Cheskidov, I.V.Gornakov,

  • B.

    L.Faktorovich, V.E.Nekhaev, V.S.Podobaev, A.D.Panfilov, A.V.Sidorov, V.O.Tkachenko,

  • A.

    F.Tuvik, L.A.Voronin (Budker Institute of Nuclear Physics, Novosibirsk, Russia)

Industrial electron accelerators type ILU

The report describes ILU type industrial electron accelerators. It describes their main parameters, design, principle of action, electron beam extraction devices, wide set of auxiliary equipment for various technological processes and ways of their usage.

Dr. Alexander Albertovich Bryazgin: Bryazgin@inp.nsk.su

A.E.Lagutin, E.B.Boyko, A.S.Kamyshan, F.F.Komarov (IAPP, Belarus)

Electrophysical complexes on basis of the electrostatic accelerator ESA-2 for fundamental and applied investigations

Electrostatic accelerator ESA-2 is a multi-purpose tool for fundamental and applied research in nuclear and particle physics. Usage of ESA-2 in quality an implanter, and as a source of ions for conducting of investigations of solid-state materials by non-destructive control methods, such as, for example, the Rutherford backscattering (RBS) is discussed. Ion implantation usage for elec- trical isolation of microelectronic devices based on IV group (Si) and III-V (GaAs) semiconduc- tors is described. In case of Si, substoichiometric nitrogen implantation is proposed as method for the creation of buried dielectric layers for device/substrate isolation. For III-V semiconduc- tors, device/device isolation can be achieved by the formation of ion beam induced defect re- gions where radiation defects produce deep-level traps for carriers. Polyenergetic and high en- ergy ion implantation is studied as the method for the formation of uniform defect distributions. The Rutherford backscattering spectrometer has been designed and assembled. It has a high reso- lution provided for usage an electrostatic energy analyzer. The energy range of detected ions is 40 to 300 keV. The energy resolution is better than 1.2 percent. Basing on experimental results it is shown that RBS spectrometer with electrostatic analyzer as a sensor can be successfully ap- plied both for shallow depth impurities profiling and also for measurements such ion beam pa- rameters, as energy and energy width. The present paper deals with the interaction of 380 keV H+ ions with Si surface at glancing angles corresponding to the quasi-channeling regime.

Andrei Evgenievich Lagutin: Lagutin@bsu.by

M.F.Vorogushin, Yu.N.Gavrish (FSUE D.V. Efremov Scientific Research Institute of Electro- physical Apparatus, St.Petersburg, Russia)

Accelerators for Non-destructive Inspection of the Nuclear Reactor Equip- ment

In compliance with requirements of IAEA, thorough inspection of the weld seams of the 1st category should be provided when manufacturing the equipment of nuclear reactors. The poten- tialities of the accelerators for defectoscopy designed and manufactured in NIIEFA are described in the paper. The accelerators allow the radiographic and radioscopic inspection to be performed in compliance with the ASTM-1-1T standard in the range 20-600 mm for steel.

Prof. Yury Nikolaevich Gavrish: npkluts@niiefa.spb.su

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